Invention Grant
US08853653B1 Apparatus and techniques for controlling ion implantation uniformity
有权
用于控制离子注入均匀性的装置和技术
- Patent Title: Apparatus and techniques for controlling ion implantation uniformity
- Patent Title (中): 用于控制离子注入均匀性的装置和技术
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Application No.: US14037207Application Date: 2013-09-25
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Publication No.: US08853653B1Publication Date: 2014-10-07
- Inventor: Stanislav S. Todorov , George M. Gammel , Richard Allen Sprenkle , Norman E. Hussey , Frank Sinclair , Shengwu Chang , Joseph C. Olson , David Roger Timberlake , Kurt T. Decker-Lucke
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/304
- IPC: H01J37/304 ; G21K5/00 ; C23C14/48

Abstract:
A system to control an ion beam in an ion implanter includes a detector system to detect a plurality of beam current measurements of the ion beam at a first frequency and an analysis component to determine a variation of the ion beam based upon the plurality of beam current measurements, the variation corresponding to a beam current variation of the ion beam at a second frequency different from the first frequency. The system also includes an adjustment component to adjust the ion beam in response to an output of the analysis component to reduce the variation, wherein the analysis component and the adjustment component are configured to dynamically reduce the variation of the ion beam below a threshold value while the ion beam is generated in the ion implanter.
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