Invention Grant
- Patent Title: Gas refraction compensation for laser-sustained plasma bulbs
- Patent Title (中): 激光持续等离子体灯泡的气体折射补偿
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Application No.: US14183134Application Date: 2014-02-18
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Publication No.: US08853655B2Publication Date: 2014-10-07
- Inventor: Ilya Bezel , Anatoly Shchemelinin , Alex Salnik , Anant Chimmalgi
- Applicant: Ilya Bezel , Anatoly Shchemelinin , Alex Salnik , Anant Chimmalgi
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Meyertons, Hood, Kivlin, Kowert & Goetzel, P.C.
- Agent Eric B. Meyertons
- Main IPC: F21V5/00
- IPC: F21V5/00 ; F21V7/00 ; F21V13/04 ; H01J37/32 ; H01J61/02

Abstract:
A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with a thickness that is varied to compensate for optical aberrations in the system.
Public/Granted literature
- US20140239202A1 GAS REFRACTION COMPENSATION FOR LASER-SUSTAINED PLASMA BULBS Public/Granted day:2014-08-28
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