Invention Grant
- Patent Title: Intracavity loss element for power amplifier
- Patent Title (中): 功率放大器的腔内损耗元件
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Application No.: US13561012Application Date: 2012-07-28
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Publication No.: US08853657B2Publication Date: 2014-10-07
- Inventor: Robert J. Rafac , Rostislav Rokitski
- Applicant: Robert J. Rafac , Rostislav Rokitski
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino McGovern IP Group LLC
- Main IPC: H01S3/00
- IPC: H01S3/00 ; G01N21/33 ; H01S3/10 ; G21K5/02 ; H01S3/23

Abstract:
A regenerative ring resonator in the path of a light beam includes a discharge chamber having electrodes and a gain medium between the electrodes; an optical coupler that is partially reflective so that at least a portion of a light beam impinging on the optical coupler from the discharge chamber is reflected back through the discharge chamber and at least a portion of the light beam impinging on the optical coupler from the discharge chamber is transmitted through the optical coupler; and an attenuation optical system in the path of the light beam within the resonator, the attenuation optical system having a plurality of distinct attenuation states, with each attenuation state defining a distinct attenuation factor applied to the light beam to provide adjustment of an energy of the light beam.
Public/Granted literature
- US20140028988A1 Intracavity Loss Element for Power Amplifier Public/Granted day:2014-01-30
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