Invention Grant
- Patent Title: Thin film transistor and method of forming the same
- Patent Title (中): 薄膜晶体管及其形成方法
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Application No.: US12902786Application Date: 2010-10-12
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Publication No.: US08853699B2Publication Date: 2014-10-07
- Inventor: Seung-Ha Choi , Kyoung-Jae Chung , Young-Wook Lee
- Applicant: Seung-Ha Choi , Kyoung-Jae Chung , Young-Wook Lee
- Applicant Address: KR Yongin, Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin, Gyeonggi-do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2010-0013611 20100212
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/423 ; H01L29/786 ; H01L27/12 ; H01L29/66

Abstract:
Disclosed are a thin film transistor and a method of forming the thin film transistor, wherein the thin film transistor includes a gate electrode, an oxide semiconductor pattern, a first gate insulating layer pattern interposed between the gate electrode and the oxide semiconductor pattern, wherein the first gate insulating layer pattern has an island shape or has two portions of different thicknesses from each other, a source electrode and a drain electrode electrically connected to the oxide semiconductor pattern, wherein the source electrode and the drain electrode are separated from each other, and a first insulating layer pattern placed between the source electrode and drain electrode and the oxide semiconductor pattern, wherein the first insulating layer pattern partially contacts the source electrode and drain electrode and the first gate insulating layer pattern, and wherein the first insulating layer is enclosed by an outer portion.
Public/Granted literature
- US20110198603A1 THIN FILM TRANSISTOR AND METHOD OF FORMING THE SAME Public/Granted day:2011-08-18
Information query
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