Invention Grant
- Patent Title: Cross-coupling of gate conductor line and active region in semiconductor devices
- Patent Title (中): 半导体器件中栅极导线与有源区的交叉耦合
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Application No.: US13207102Application Date: 2011-08-10
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Publication No.: US08853700B2Publication Date: 2014-10-07
- Inventor: Viraj Y. Sardesai , Robert C. Wong
- Applicant: Viraj Y. Sardesai , Robert C. Wong
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Joseph P. Abate, Esq.
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L27/092 ; H01L21/768 ; H01L27/11 ; H01L27/02 ; H01L29/66 ; H01L29/51

Abstract:
Cross-coupling between a gate conductor and an active region of a semiconductor substrate is provided by forming a gate dielectric layer on the semiconductor substrate and lithographically patterning the gate dielectric layer to form opening therein over a portion of the active region at which electrical contact with the gate conductor is desired. After implanting electrical dopants, a gate conductor layer is deposited and patterned. A remaining portion of the gate conductor layer includes an integral conductor structure, which includes a first portion overlying a gate dielectric over an active region and a second portion contacting the semiconductor material of the same active region or a different active region. The gate dielectric layer can be deposited within gate cavities in planarization dielectric material layer in a replacement gate scheme, or can be deposited on planar surfaces of active regions and/or shallow trench isolation structures in a gate first processing scheme.
Public/Granted literature
- US20130037864A1 CROSS-COUPLING OF GATE CONDUCTOR LINE AND ACTIVE REGION IN SEMICONDUCTOR DEVICES Public/Granted day:2013-02-14
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