Invention Grant
- Patent Title: Semiconductor device having nitride layers
- Patent Title (中): 具有氮化物层的半导体器件
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Application No.: US14039716Application Date: 2013-09-27
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Publication No.: US08853742B2Publication Date: 2014-10-07
- Inventor: Akira Yoshioka , Yasunobu Saito , Wataru Saito
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Patterson & Sheridan, LLP
- Priority: JP2012-070228 20120326
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/06 ; H01L29/78 ; H01L21/8252 ; H01L29/417 ; H01L29/47 ; H01L29/778 ; H01L27/07 ; H01L29/872 ; H01L29/20

Abstract:
According to one embodiment, a second nitride semiconductor layer is provided on a first nitride semiconductor layer and has a band gap wider than that of the first nitride semiconductor layer. A third nitride semiconductor layer is provided above the second nitride semiconductor layer. A fourth nitride semiconductor layer is provided on the third nitride semiconductor layer and has a band gap wider than that of the third nitride semiconductor layer. A fifth nitride semiconductor layer is provided between the second and the third nitride semiconductor layers. A first electrode contacts the second, the third and the fourth nitride semiconductor layers. A second electrode is provided on the fourth nitride semiconductor layer. A gate electrode is provided on a gate insulating layer between the first and the second electrodes. A third electrode is in contact with the second nitride semiconductor layer.
Public/Granted literature
- US20140097505A1 SEMICONDUCTOR DEVICE HAVING NITRIDE LAYERS Public/Granted day:2014-04-10
Information query
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