Invention Grant
US08853764B1 Integration of low Rdson LDMOS with high sheet resistance poly resistor
有权
低Rdson LDMOS与高电阻聚电阻的集成
- Patent Title: Integration of low Rdson LDMOS with high sheet resistance poly resistor
- Patent Title (中): 低Rdson LDMOS与高电阻聚电阻的集成
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Application No.: US13832682Application Date: 2013-03-15
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Publication No.: US08853764B1Publication Date: 2014-10-07
- Inventor: Guowei Zhang , Deyan Chen
- Applicant: Guowei Zhang , Deyan Chen
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd
- Current Assignee Address: SG Singapore
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L21/336 ; H01L29/66 ; H01L29/78

Abstract:
A method for forming a low Rdson LDNMOS and a high sheet resistance poly resistor and the resulting device are provided. Embodiments include forming first, second, and third STI regions in a substrate; forming a P-well in the substrate around the first STI region with a first mask; forming an N-drift region in the substrate between the P-well and the third STI region with the first mask; forming a dielectric layer over the substrate; forming a poly-silicon layer over the dielectric layer; performing an N-drain implant between the second and third STI regions with a second mask; performing a resistance adjustment implant in, but not through, the poly-silicon layer with the second mask; and patterning the poly-silicon and dielectric layers subsequent to performing the resistance adjustment implant to form a gate stack and a poly resistor, the poly resistor being formed over the third STI region and laterally separated from the gate stack.
Public/Granted literature
- US20140264576A1 INTEGRATION OF LOW RDSON LDMOS WITH HIGH SHEET RESISTANCE POLY RESISTOR Public/Granted day:2014-09-18
Information query
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