Invention Grant
- Patent Title: 3D NAND flash memory
- Patent Title (中): 3D NAND闪存
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Application No.: US13772058Application Date: 2013-02-20
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Publication No.: US08853818B2Publication Date: 2014-10-07
- Inventor: Hang-Ting Lue
- Applicant: Hang-Ting Lue
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Agent Yiding Wu
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L21/82

Abstract:
A memory device includes an array of NAND strings of memory cells. The device includes a plurality of stacks of conductive strips separated by insulating material, including at least a bottom plane of conductive strips, a plurality of intermediate planes of conductive strips, and a top plane of conductive strips. The device includes charge storage structures in interface regions at cross-points between side surfaces of the conductive strips in the plurality of intermediate planes in the stacks and inter-stack semiconductor body elements of a plurality of bit line structures. At least one reference line structure is arranged orthogonally over the stacks, including vertical conductive elements between the stacks in electrical communication with a reference conductor between the bottom plane of conductive strips and a substrate, and linking elements over the stacks connecting the vertical conductive elements. The vertical conductive elements have a higher conductivity than the semiconductor body elements.
Public/Granted literature
- US20140231954A1 3D NAND FLASH MEMORY Public/Granted day:2014-08-21
Information query
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