Invention Grant
- Patent Title: Methods and apparatus for bipolar junction transistors and resistors
- Patent Title (中): 双极结晶体管和电阻器的方法和装置
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Application No.: US13471223Application Date: 2012-05-14
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Publication No.: US08853826B2Publication Date: 2014-10-07
- Inventor: Jui-Yao Lai , Shyh-Wei Wang , Yen-Ming Chen
- Applicant: Jui-Yao Lai , Shyh-Wei Wang , Yen-Ming Chen
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater and Matsil, L.L.P.
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
Methods and apparatus for bipolar junction transistors (BJTs) are disclosed. A BJT comprises a collector made of p-type semiconductor material, a base made of n-type well on the collector; and an emitter comprising a p+ region on the base and a SiGe layer on the p+ region. The BJT can be formed by providing a semiconductor substrate comprising a collector, a base on the collector, forming a sacrificial layer on the base, patterning a first photoresist on the sacrificial layer to expose an opening surrounded by a STI within the base; implanting a p-type material through the sacrificial layer into an area of the base, forming a p+ region from the p-type implant; forming a SiGe layer on the etched p+ region to form an emitter. The process can be shared with manufacturing a polysilicon transistor up through the step of patterning a first photoresist on the sacrificial layer.
Public/Granted literature
- US20130299944A1 Methods and Apparatus for Bipolar Junction Transistors and Resistors Public/Granted day:2013-11-14
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