Invention Grant
- Patent Title: Circular transmission line methods compatible with combinatorial processing of semiconductors
- Patent Title (中): 圆形传输线方法兼容半导体的组合处理
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Application No.: US13594292Application Date: 2012-08-24
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Publication No.: US08854067B2Publication Date: 2014-10-07
- Inventor: Amol Joshi , Charlene Chen , John Foster , Zhendong Hong , Olov Karlsson , Bei Li , Dipankar Pramanik , Usha Raghuram , Mark Victor Raymond , Jingang Su , Bin Yang
- Applicant: Amol Joshi , Charlene Chen , John Foster , Zhendong Hong , Olov Karlsson , Bei Li , Dipankar Pramanik , Usha Raghuram , Mark Victor Raymond , Jingang Su , Bin Yang
- Applicant Address: US CA San Jose KY Grand Cayman
- Assignee: Intermolecular, Inc.,GLOBALFOUNDRIES, Inc.
- Current Assignee: Intermolecular, Inc.,GLOBALFOUNDRIES, Inc.
- Current Assignee Address: US CA San Jose KY Grand Cayman
- Main IPC: G01R27/08
- IPC: G01R27/08 ; G01R31/28
Abstract:
Methods and structures are described for determining contact resistivities and Schottky barrier heights for conductors deposited on semiconductor wafers that can be combined with combinatorial processing, allowing thereby numerous processing conditions and materials to be tested concurrently. Methods for using multi-ring as well as single-ring CTLM structures to cancel parasitic resistance are also described, as well as structures and processes for inline monitoring of properties.
Public/Granted literature
- US20140055152A1 CIRCULAR TRANSMISSION LINE METHODS COMPATIBLE WITH COMBINATORIAL PROCESSING OF SEMICONDUCTORS Public/Granted day:2014-02-27
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