Invention Grant
US08854149B2 MEMS resonator, manufacturing method thereof, and signal processing method using MEMS resonator
有权
MEMS谐振器，其制造方法和使用MEMS谐振器的信号处理方法
- Patent Title: MEMS resonator, manufacturing method thereof, and signal processing method using MEMS resonator
- Patent Title (中): MEMS谐振器，其制造方法和使用MEMS谐振器的信号处理方法
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Application No.: US13615656Application Date: 2012-09-14
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Publication No.: US08854149B2Publication Date: 2014-10-07
- Inventor: Sheng-Shian Li , Cheng-Syun Li
- Applicant: Sheng-Shian Li , Cheng-Syun Li
- Applicant Address: TW Hsinchu
- Assignee: National Tsing Hua University
- Current Assignee: National Tsing Hua University
- Current Assignee Address: TW Hsinchu
- Agency: CKC & Partners Co., Ltd.
- Priority: TW101123297A 20120628
- Main IPC: H03B5/30
- IPC: H03B5/30 ; H03H9/05 ; H03H9/24
Abstract:
A capacitively-driven Micro-Electro-Mechanical System (MEMS) resonator is provided, in which a piezoresistively differential measurement is used to enable the MEMS resonator to transfer a signal. The MEMS resonator uses a Complementary Metal-Oxide-Semiconductor (CMOS) manufacturing process to make its oscillator and piezoresistor to achieve electrical insulation, thereby lowering the level of feedthrough signal.
Public/Granted literature
- US20140002201A1 MEMS RESONATOR, MANUFACTORING METHOD THEREOF, AND SIGNAL PROCESSING METHOD USING MEMS RESONATOR Public/Granted day:2014-01-02
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