Invention Grant
- Patent Title: Automated bubble detection apparatus and method
- Patent Title (中): 自动气泡检测装置及方法
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Application No.: US13276837Application Date: 2011-10-19
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Publication No.: US08854451B2Publication Date: 2014-10-07
- Inventor: Josh Cormier , Fangli Hao , Hong Shih , Tuochuan Huang , John Daugherty , Allan Ronne , Fred Dennis Egley
- Applicant: Josh Cormier , Fangli Hao , Hong Shih , Tuochuan Huang , John Daugherty , Allan Ronne , Fred Dennis Egley
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: H04N7/18
- IPC: H04N7/18 ; G01N21/27 ; G01N17/02 ; C25D11/04

Abstract:
An automated hydrogen bubble detection apparatus includes a horizontal support surface on which a test coupon can be supported, a transparent tube having an open top and an open bottom and operable to contain a test solution when positioned on a test coupon, a camera arranged to view a test solution in the transparent tube, and a controller in communication with the camera and effective to operate the camera such that at least one video segment is recorded by the camera and analyzed to detect first bubble and continuous bubble generation. A method of evaluating corrosion resistance of coatings on aluminum and steel in acidic solution is also included.
Public/Granted literature
- US20130100278A1 AUTOMATED BUBBLE DETECTION APPARATUS AND METHOD Public/Granted day:2013-04-25
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