Invention Grant
- Patent Title: Holding device for an optical element in an objective
- Patent Title (中): 物镜中光学元件的保持装置
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Application No.: US10580179Application Date: 2004-11-22
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Publication No.: US08854602B2Publication Date: 2014-10-07
- Inventor: Bernhard Gellrich , Andreas Wurmbrand , Jens Kugler , Armin Schoeppach , Christian Zengerling , Stephane Bruynooghe
- Applicant: Bernhard Gellrich , Andreas Wurmbrand , Jens Kugler , Armin Schoeppach , Christian Zengerling , Stephane Bruynooghe
- Applicant Address: NL Veldhoven, NB DE Oberkochen
- Assignee: ASML Netherlands B.V.,Carl Zeiss SMT GmbH
- Current Assignee: ASML Netherlands B.V.,Carl Zeiss SMT GmbH
- Current Assignee Address: NL Veldhoven, NB DE Oberkochen
- Agency: Wells St. John P.S.
- Priority: DE10356730 20031202
- International Application: PCT/EP2004/013228 WO 20041122
- International Announcement: WO2005/054953 WO 20050616
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/68 ; G03F7/20 ; G03B27/52 ; G03B27/42
Abstract:
A holding device for an optical element in an objective has a mount that is connected to the objective, on the one hand, and at least indirectly to the optical element, on the other hand. Arranged between the mount and the optical element is a reinforcing element whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element.
Public/Granted literature
- US20080002170A1 Holding Device for an Optical Element in an Objective Public/Granted day:2008-01-03
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