发明授权
- 专利标题： Holding device for an optical element in an objective
- 专利标题（中）： 物镜中光学元件的保持装置
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申请号： US10580179申请日： 2004-11-22
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公开(公告)号： US08854602B2公开(公告)日： 2014-10-07
- 发明人: Bernhard Gellrich , Andreas Wurmbrand , Jens Kugler , Armin Schoeppach , Christian Zengerling , Stephane Bruynooghe
- 申请人： Bernhard Gellrich , Andreas Wurmbrand , Jens Kugler , Armin Schoeppach , Christian Zengerling , Stephane Bruynooghe
- 申请人地址： NL Veldhoven, NB DE Oberkochen
- 专利权人： ASML Netherlands B.V.,Carl Zeiss SMT GmbH
- 当前专利权人： ASML Netherlands B.V.,Carl Zeiss SMT GmbH
- 当前专利权人地址： NL Veldhoven, NB DE Oberkochen
- 代理机构： Wells St. John P.S.
- 优先权： DE10356730 20031202
- 国际申请： PCT/EP2004/013228 WO 20041122
- 国际公布： WO2005/054953 WO 20050616
- 主分类号： G03B27/54
- IPC分类号： G03B27/54 ; G03B27/68 ; G03F7/20 ; G03B27/52 ; G03B27/42
摘要：
A holding device for an optical element in an objective has a mount that is connected to the objective, on the one hand, and at least indirectly to the optical element, on the other hand. Arranged between the mount and the optical element is a reinforcing element whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element.
公开/授权文献
- US20080002170A1 Holding Device for an Optical Element in an Objective 公开/授权日：2008-01-03