Invention Grant
- Patent Title: Gravitation compensation for optical elements in projection exposure apparatuses
- Patent Title (中): 投影曝光装置中的光学元件的重力补偿
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Application No.: US13111492Application Date: 2011-05-19
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Publication No.: US08854603B2Publication Date: 2014-10-07
- Inventor: Norbert Muehlberger , Thorsten Rassel , Armin Schoeppach , Juergen Fischer , Matthias Orth
- Applicant: Norbert Muehlberger , Thorsten Rassel , Armin Schoeppach , Juergen Fischer , Matthias Orth
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102008054550 20081211
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/42 ; G03F7/20

Abstract:
A gravitation compensator for mounting optical elements in a projection exposure apparatus and a corresponding projection exposure apparatus are disclosed. The gravitation compensator at least partly compensates for the weight force of a mounted optical element and simultaneously enables a change in the position of the optical element without the compensated weight force being altered in an impermissible manner during the change in position. This applies, in particular, to high weight forces which are to be compensated. Furthermore, the gravitation compensator enables use in different atmospheres and the compensation of corresponding aging effects.
Public/Granted literature
- US20110267596A1 GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSURE APPARATUSES Public/Granted day:2011-11-03
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