Invention Grant
US08854603B2 Gravitation compensation for optical elements in projection exposure apparatuses 有权
投影曝光装置中的光学元件的重力补偿

Gravitation compensation for optical elements in projection exposure apparatuses
Abstract:
A gravitation compensator for mounting optical elements in a projection exposure apparatus and a corresponding projection exposure apparatus are disclosed. The gravitation compensator at least partly compensates for the weight force of a mounted optical element and simultaneously enables a change in the position of the optical element without the compensated weight force being altered in an impermissible manner during the change in position. This applies, in particular, to high weight forces which are to be compensated. Furthermore, the gravitation compensator enables use in different atmospheres and the compensation of corresponding aging effects.
Information query
Patent Agency Ranking
0/0