Invention Grant
US08854615B2 Inspection apparatus and inspection method 有权
检验仪器和检验方法

Inspection apparatus and inspection method
Abstract:
According to one embodiment, an inspection apparatus includes a first monochromatic body disposed behind an inspection target including a transparent member or a semitransparent member, relative to an observation position which deviates from a normal direction of the inspection target, a light source configured to illuminate the inspection target and disposed at such a position in front of the inspection target that an image of the light source is not reflected on the inspection target which is observed at the observation position, and a second monochromatic body disposed at such a position in front of the inspection target that an image of the second monochromatic body is reflected on the inspection target which is observed at the observation position.
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