Invention Grant
- Patent Title: Inspection apparatus and inspection method
- Patent Title (中): 检验仪器和检验方法
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Application No.: US13179767Application Date: 2011-07-11
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Publication No.: US08854615B2Publication Date: 2014-10-07
- Inventor: Atsushi Tanabe
- Applicant: Atsushi Tanabe
- Applicant Address: JP Tokyo
- Assignee: Japan Display Inc.
- Current Assignee: Japan Display Inc.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-167385 20100726
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
According to one embodiment, an inspection apparatus includes a first monochromatic body disposed behind an inspection target including a transparent member or a semitransparent member, relative to an observation position which deviates from a normal direction of the inspection target, a light source configured to illuminate the inspection target and disposed at such a position in front of the inspection target that an image of the light source is not reflected on the inspection target which is observed at the observation position, and a second monochromatic body disposed at such a position in front of the inspection target that an image of the second monochromatic body is reflected on the inspection target which is observed at the observation position.
Public/Granted literature
- US20120019817A1 INSPECTION APPARATUS AND INSPECTION METHOD Public/Granted day:2012-01-26
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