Invention Grant
- Patent Title: Optical element unit
- Patent Title (中): 光元件单元
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Application No.: US14070144Application Date: 2013-11-01
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Publication No.: US08854743B2Publication Date: 2014-10-07
- Inventor: Johannes Lippert
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G02B15/14
- IPC: G02B15/14 ; G02B7/02 ; G03G15/04

Abstract:
An optical element unit is provided comprising an optical element group for projecting light along an optical axis of the optical element group and a housing having an inner housing part partly defining a first space and a light passageway between the inner housing part and a second space. The inner housing part receives the optical element group. The optical element group comprises an ultimate optical element located in the region of the light passageway. A load-relieving device is provided adjacent to the ultimate optical element, the load relieving device partly defining the first space and the second space and at least partly relieving the ultimate optical element from loads resulting from pressure differences between the first space.
Public/Granted literature
- US20140064791A1 OPTICAL ELEMENT UNIT Public/Granted day:2014-03-06
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