Invention Grant
- Patent Title: Microphone and accelerometer
- Patent Title (中): 麦克风和加速度计
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Application No.: US13255048Application Date: 2010-02-03
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Publication No.: US08855337B2Publication Date: 2014-10-07
- Inventor: Twan van Lippen , Geert Langereis , Martijn Goossens
- Applicant: Twan van Lippen , Geert Langereis , Martijn Goossens
- Applicant Address: NL Eindhoven
- Assignee: NXP, B.V.
- Current Assignee: NXP, B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP09154611 20090309
- International Application: PCT/IB2010/050505 WO 20100203
- International Announcement: WO2010/103410 WO 20100916
- Main IPC: H04R19/00
- IPC: H04R19/00 ; H01L21/02 ; H04R1/24 ; B81C1/00

Abstract:
The invention relates to a method for manufacturing a micromachined microphone and an accelerometer from a wafer 1 having a first layer 2, the method comprising the steps of dividing the first layer 2 into a microphone layer 5 and into an accelerometer layer 6, covering a front side of the microphone layer 5 and a front side of the accelerometer layer 6 with a continuous second layer 7, covering the second layer 7 with a third layer 8, forming a plurality of trenches 9 in the third layer 8, removing a part 10 of the wafer 1 below a back side of the microphone layer 5, forming at least two wafer trenches 11 in the wafer 1 below a back side of the accelerometer layer 6, and removing a part 12, 13 of the second layer 7 through the plurality of trenches 9 formed in the third layer 8. The micromachined microphone and the accelerometer according to the invention is advantageous over prior art as it allows for body noise cancellation in order to minimize structure borne sound.
Public/Granted literature
- US20120033832A1 MICROPHONE AND ACCELEROMETER Public/Granted day:2012-02-09
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