Invention Grant
US08855399B2 System, a method and a computer program product for CAD-based registration
有权
系统，方法和计算机程序产品，用于基于CAD的注册
- Patent Title: System, a method and a computer program product for CAD-based registration
- Patent Title (中): 系统，方法和计算机程序产品，用于基于CAD的注册
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Application No.: US13368306Application Date: 2012-02-07
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Publication No.: US08855399B2Publication Date: 2014-10-07
- Inventor: Zvi Goren , Nir Ben-David Dodzin
- Applicant: Zvi Goren , Nir Ben-David Dodzin
- Applicant Address: IE Rehovot
- Assignee: Applied Materials Israel, Ltd.
- Current Assignee: Applied Materials Israel, Ltd.
- Current Assignee Address: IE Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06K9/00
- IPC: G06K9/00
Abstract:
A system for location based wafer analysis, the system comprising: (i) a first input interface; (ii) a second input interface; (iii) a correlator; and (iv) a processor, configured to generate inspection results for the inspected wafer, with the help of at least one frame run-time displacement.
Public/Granted literature
- US20130202187A1 SYSTEM, A METHOD AND A COMPUTER PROGRAM PRODUCT FOR CAD-BASED REGISTRATION Public/Granted day:2013-08-08
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