Invention Grant
- Patent Title: Methods and systems involving measuring complex dimensions of silicon devices
- Patent Title (中): 涉及测量硅器件复杂尺寸的方法和系统
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Application No.: US12915398Application Date: 2010-10-29
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Publication No.: US08855401B2Publication Date: 2014-10-07
- Inventor: Charles N. Archie , Anastasios A. Katsetos , Eric P. Solecky , Georgios A. Vakas
- Applicant: Charles N. Archie , Anastasios A. Katsetos , Eric P. Solecky , Georgios A. Vakas
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent William Steinberg
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00

Abstract:
A method for measuring a dimension of a device includes receiving an image of a portion of the device, receiving a first offset value and a second offset value, processing the image to define a least one graph of a line of pixels, the at least one graph including the brightness level of each pixel in a line of pixels, identifying a location of a first peak and a second peak in the graph, defining a first exclusion area boundary, defining a second exclusion area boundary, setting the brightness level of the pixels between the first exclusion area boundary and the second exclusion area boundary to zero, identifying a first portion of the feature of interest and a second portion of the feature of interest, and measuring a distance between the first portion of the feature of interest and the second portion of the feature of interest.
Public/Granted literature
- US20120106824A1 Methods and Systems Involving Measuring Complex Dimensions of Silicon Devices Public/Granted day:2012-05-03
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