Invention Grant
US08855402B2 Image creation method, substrate inspection method, non-transitory recording medium having program recorded thereon for executing image creation method or substrate inspection method, and substrate inspection apparatus
有权
图像创建方法，基板检查方法，其中记录有用于执行图像创建方法或基板检查方法的程序的非瞬时记录介质以及基板检查装置
- Patent Title: Image creation method, substrate inspection method, non-transitory recording medium having program recorded thereon for executing image creation method or substrate inspection method, and substrate inspection apparatus
- Patent Title (中): 图像创建方法，基板检查方法，其中记录有用于执行图像创建方法或基板检查方法的程序的非瞬时记录介质以及基板检查装置
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Application No.: US13406789Application Date: 2012-02-28
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Publication No.: US08855402B2Publication Date: 2014-10-07
- Inventor: Hiroshi Tomita , Kazuya Hisano , Tadashi Nishiyama
- Applicant: Hiroshi Tomita , Kazuya Hisano , Tadashi Nishiyama
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Posz Law Group, PLC
- Priority: JP2011-058277 20110316
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00 ; G06K9/46
Abstract:
An image creation method of creating a filter image for removing a pseudo defect to inspect presence/absence of a defect on a substrate includes a filter image creation step of creating the filter image by replacing a picture element value of any one of picture elements located on a circumference of a circle about a center position of a registered image with a maximum value of picture element values of a plurality of picture elements selected from among the picture elements located on the circumference.
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