Invention Grant
US08855949B2 Plasma processing device and method of monitoring discharge state in plasma processing device
有权
等离子体处理装置和等离子体处理装置中的放电状态监视方法
- Patent Title: Plasma processing device and method of monitoring discharge state in plasma processing device
- Patent Title (中): 等离子体处理装置和等离子体处理装置中的放电状态监视方法
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Application No.: US13001810Application Date: 2009-06-29
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Publication No.: US08855949B2Publication Date: 2014-10-07
- Inventor: Masaru Nonomura
- Applicant: Masaru Nonomura
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Pearne & Gordon LLP
- Priority: JPP2008-172974 20080702
- International Application: PCT/JP2009/003000 WO 20090629
- International Announcement: WO2010/001583 WO 20100107
- Main IPC: G01R15/00
- IPC: G01R15/00 ; H01J37/32

Abstract:
An object is to provide a plasma processing device capable of properly monitoring a state of plasma discharge and detecting a precursor to abnormal discharge, and a method of monitoring the state of discharge in the plasma processing device. In analysis processing for monitoring executed by detecting, by a signal analyzing portion 30, a signal of a potential change induced in a discharge detection sensor 23 in response to a change in plasma discharge of the inside of a processing chamber and recorded in a signal recorder 20, based on a counter value N3 obtained by detecting a signal of abnormal discharge (first arc discharge) generated between an electrode portion and an object to be processed by a first detector 33 and a counter value N4 obtained by detecting a signal of micro-arc discharge (second arc discharge) generated by deposition of a foreign substance in the processing chamber by a second detector 35, an abnormal discharge determining portion 39 calculates a difference (N3−N4) and compares the difference (N3−N4) with a threshold value a2 for determination and determines whether there is a possibility of generation of abnormal discharge in the processing chamber.
Public/Granted literature
- US20110109530A1 PLASMA PROCESSING DEVICE AND METHOD OF MONITORING DISCHARGE STATE IN PLASMA PROCESSING DEVICE Public/Granted day:2011-05-12
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