Invention Grant
- Patent Title: Integrated circuit layout modification
- Patent Title (中): 集成电路布局修改
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Application No.: US13354707Application Date: 2012-01-20
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Publication No.: US08856696B2Publication Date: 2014-10-07
- Inventor: Wen-Hao Chen , Yuan-Te Hou , Yi-Kan Cheng
- Applicant: Wen-Hao Chen , Yuan-Te Hou , Yi-Kan Cheng
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman & Ham, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
Methods are disclosed of modifying an integrated circuit (IC) design that utilizes multiple patterning technology (MPT). The methods include configuring a first layout of an integrated circuit, having at least one layer with features to be formed utilizing fabrication by at least two masks. The at least one layer includes a plurality of active cells and a plurality of spare cells. A second layout is configured to re-route the spare cells and active cells, wherein the re-routing utilizes at least a portion of the plurality of spare cells. Fewer than all of the at least two masks are replaced to configure the second layout.
Public/Granted literature
- US20130191796A1 INTEGRATED CIRCUIT LAYOUT MODIFICATION Public/Granted day:2013-07-25
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