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US08859043B2 Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
有机层沉积装置及使用该有机发光显示装置的有机发光显示装置的制造方法

Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
摘要：
An organic layer deposition apparatus for forming an organic layer on a substrate includes: a deposition source configured to discharge a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; and a patterning slit sheet facing the deposition source nozzle unit and including a plurality of patterning slits and at least one spacer arranged between a pair of adjacent patterning slits of the plurality of patterning slits, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction, and the substrate is spaced apart from the organic layer deposition apparatus by a predetermined distance, and at least one of the substrate or the organic layer deposition apparatus is movable relative to the other.
摘要（中）：

用于在基板上形成有机层的有机层沉积装置包括：沉积源，其被配置为排出沉积材料; 沉积源喷嘴单元，布置在沉积源的一侧并且包括多个沉积源喷嘴; 以及与所述沉积源喷嘴单元相对并且包括多个图案化狭缝的图案化缝隙片和布置在所述多个图案化缝隙的一对相邻图案化缝隙之间的至少一个间隔件，所述图案化缝隙片材至少在所述衬底上至少 垂直于第一方向的第一方向或第二方向之一，并且基板与有机层沉积装置间隔预定距离，并且基板或有机层沉积装置中的至少一个可相对于 其他。

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