发明授权
- 专利标题: Micromachined resonant magnetic field sensors
- 专利标题(中): 微机械谐振磁场传感器
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申请号: US13004365申请日: 2011-01-11
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公开(公告)号: US08860409B2公开(公告)日: 2014-10-14
- 发明人: Joseph Seeger , Chiung C. Lo , Baris Cagdaser , Derek Shaeffer
- 申请人: Joseph Seeger , Chiung C. Lo , Baris Cagdaser , Derek Shaeffer
- 申请人地址: US CA San Jose
- 专利权人: Invensense, Inc.
- 当前专利权人: Invensense, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Sawyer Law Group, P.C.
- 主分类号: G01R33/02
- IPC分类号: G01R33/02 ; G01R33/028 ; G01R33/038
摘要:
A micromachined magnetic field sensor is disclosed. The micromachined magnetic field comprises a substrate; a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis. The micromachined magnetic field sensor also includes a sense subsystem, the sense subsystem includes a plurality of beams, and at least one anchor connected to the substrate; wherein a portion of the sense subsystem moves along a fourth axis; a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and a position transducer to detect the motion of the sense subsystem.
公开/授权文献
- US20120176128A1 MICROMACHINED RESONANT MAGNETIC FIELD SENSORS 公开/授权日:2012-07-12
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