发明授权
- 专利标题: Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
- 专利标题(中): 薄膜沉积装置及使用该有机发光显示装置的方法
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申请号: US13031756申请日: 2011-02-22
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公开(公告)号: US08865252B2公开(公告)日: 2014-10-21
- 发明人: Yong Sup Choi , Myeng-Woo Nam , Jong-Won Hong , Seok-Rak Chang , Eun-Sun Choi
- 申请人: Yong Sup Choi , Myeng-Woo Nam , Jong-Won Hong , Seok-Rak Chang , Eun-Sun Choi
- 申请人地址: KR Yongin-si
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin-si
- 代理机构: Christie, Parker & Hale, LLP
- 优先权: KR10-2010-0031556 20100406
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; B05D5/06 ; H01L21/677 ; H01L51/56 ; H01L21/67 ; H01L21/673 ; H01L21/687
摘要:
A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. The thin film deposition apparatus includes: a loading unit to place a substrate, which is a deposition target, on an electrostatic chuck; a deposition unit including a chamber, and a thin film deposition assembly that is disposed in the chamber and forms a thin film on the substrate placed on the electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; a first conveyor unit to sequentially move the electrostatic chuck having the substrate thereon to the loading unit, to the deposition unit, and finally, to the unloading unit, wherein the first conveyor unit includes: one pair of first guide rails and one pair of second guide rails disposed in parallel; at least one first guide block engaged with the first guide rails, respectively; and at least one second guide block engaged with the second guide rails, respectively.