Invention Grant
- Patent Title: Methods for forming templated materials
- Patent Title (中): 形成模板材料的方法
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Application No.: US13727237Application Date: 2012-12-26
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Publication No.: US08865484B2Publication Date: 2014-10-21
- Inventor: Monica Mathur , Michael Miller , Prashant B. Phatak
- Applicant: Intermolecular, Inc.
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/66
- IPC: H01L21/66
Abstract:
Methods of forming layers can comprise defining a plurality of discrete site-isolated regions (SIRs) on a substrate, forming a first layer on one of the discrete SIRs, forming a second layer on the first layer, measuring a lattice parameter or an electrical property of the second layer, The process parameters for the formation of the first layer are varied in a combinatorial manner between different discrete SIRs to explore the possible layers that can result in suitable lattice matching for second layer of a desired crystalline structure.
Public/Granted literature
- US20140179033A1 Methods for Forming Templated Materials Public/Granted day:2014-06-26
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