发明授权
US08869738B2 Mask frame assembly for thin film deposition and the manufacturing method thereof 有权
用于薄膜沉积的面罩框架组件及其制造方法

Mask frame assembly for thin film deposition and the manufacturing method thereof
摘要:
A mask frame assembly using a plurality of stick-shaped split masks. The mask frame assembly includes a plurality of split masks, each of which includes a deposition pattern corresponding to a unit screen. Each of the split masks is formed of a plurality of partial masks to form the deposition pattern corresponding to a unit screen. Accordingly, the split masks accommodating a pattern corresponding to a large screen may be easily manufactured without an increase in the amount of etching errors.
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