发明授权
- 专利标题: Mask frame assembly for thin film deposition and the manufacturing method thereof
- 专利标题(中): 用于薄膜沉积的面罩框架组件及其制造方法
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申请号: US13244100申请日: 2011-09-23
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公开(公告)号: US08869738B2公开(公告)日: 2014-10-28
- 发明人: Eui-Shin Shin , Jae-Seok Park , Young-Geun Cho , Woo-Dong Kim , Kyu-Bum Kim , Jeung-Woo Huh
- 申请人: Eui-Shin Shin , Jae-Seok Park , Young-Geun Cho , Woo-Dong Kim , Kyu-Bum Kim , Jeung-Woo Huh
- 申请人地址: KR Yongin, Gyeonggi-Do
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin, Gyeonggi-Do
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: KR10-2010-0127858 20101214
- 主分类号: B05C11/11
- IPC分类号: B05C11/11 ; B05D5/00 ; G03F1/00
摘要:
A mask frame assembly using a plurality of stick-shaped split masks. The mask frame assembly includes a plurality of split masks, each of which includes a deposition pattern corresponding to a unit screen. Each of the split masks is formed of a plurality of partial masks to form the deposition pattern corresponding to a unit screen. Accordingly, the split masks accommodating a pattern corresponding to a large screen may be easily manufactured without an increase in the amount of etching errors.
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