发明授权
- 专利标题: Photomultiplier and manufacturing method thereof
- 专利标题(中): 光电倍增管及其制造方法
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申请号: US13601948申请日: 2012-08-31
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公开(公告)号: US08871557B2公开(公告)日: 2014-10-28
- 发明人: Joon Sung Lee , Yong Sun Yoon
- 申请人: Joon Sung Lee , Yong Sun Yoon
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 优先权: KR10-2011-0089023 20110902; KR10-2012-0026726 20120315
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L31/107
摘要:
Provided are a photomultiplier and a manufacturing method thereof. The manufacturing method thereof may include forming a mask layer on an active region of a substrate doped with a first conductive type, ion implanting a second conductive type impurity opposite to the first conductive type into the substrate to form a first doped region in the active region under the mask layer and an non-active region exposed from the mask layer, forming a device isolation layer on the non-active region, removing the mask layer, and ion implanting the second conductive type impurity having a concentration higher than that of the first doped region into an upper portion of the first doped region in the active region to form a second doped region shallower than the first doped region.
公开/授权文献
- US20130056843A1 PHOTOMULTIPLIER AND MANUFACTURING METHOD THEREOF 公开/授权日:2013-03-07
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