发明授权
- 专利标题： Method for producing hybrid components
- 专利标题（中）： 混合组分的制备方法
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申请号： US12663096申请日： 2008-06-06
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公开(公告)号： US08871607B2公开(公告)日： 2014-10-28
- 发明人: Thomas Signamarcheix , Franck Fournel , Hubert Moriceau
- 申请人： Thomas Signamarcheix , Franck Fournel , Hubert Moriceau
- 申请人地址： FR Bernin FR Paris
- 专利权人： S.O.I. TEC Silicon on Insulator Technologies,Commissariat a l'Energie Atomique
- 当前专利权人： S.O.I. TEC Silicon on Insulator Technologies,Commissariat a l'Energie Atomique
- 当前专利权人地址： FR Bernin FR Paris
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权： FR0755531 20070606
- 国际申请： PCT/EP2008/057110 WO 20080606
- 国际公布： WO2008/148882 WO 20081211
- 主分类号： H01L21/30
- IPC分类号： H01L21/30 ; H01L21/8238 ; H01L21/762 ; H01L21/8258 ; H01L21/84
摘要：
A method for producing a hybrid substrate, including a support substrate, a continuous buried insulator layer and, on this continuous layer, a hybrid layer including alternating zones of a first material and at least one second material, wherein these two materials are different by their nature and/or their crystallographic characteristics. The method forms a hybrid layer, including alternating zones of first and second materials, on a homogeneous substrate, assembles this hybrid layer, the continuous insulator layer and the support substrate, and eliminates a part at least of the homogeneous substrate, before or after the assembling.
公开/授权文献
- US20110163410A1 METHOD FOR PRODUCING HYBRID COMPONENTS 公开/授权日：2011-07-07
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