A method and apparatus for assessing at least one of motion linearity of a motion stage, stage motion straightness of a motion stage, image capture repeatability of a motion stage and camera and accuracy of a calibration plate used to assess motion stage characteristics, the method including using a line scan camera to generate two dimensional images of a calibration plate having a plurality imageable features thereon, examining the images to identify actual coordinates of the imageable features and using the actual coordinates to assess linearity, straightness, repeatability and/or plate accuracy.