发明授权
US08873151B2 Illumination system for a microlithgraphic exposure apparatus 有权
微型照相曝光设备的照明系统

Illumination system for a microlithgraphic exposure apparatus
摘要:
An illumination system of a microlithographic exposure apparatus comprises a condenser for transforming a pupil plane into a field plane. The condenser has a lens group that contains a plurality of consecutive lenses. These lenses are arranged such that a light bundle focused by the condenser on an on-axis field point converges within each lens of the lens group. At least one lens of the lens group has a concave surface. The illumination system may further comprise a field stop objective that at least partly corrects a residual pupil aberration of the condenser.
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