发明授权
- 专利标题: Illumination system for a microlithgraphic exposure apparatus
- 专利标题(中): 微型照相曝光设备的照明系统
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申请号: US11911904申请日: 2006-04-26
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公开(公告)号: US08873151B2公开(公告)日: 2014-10-28
- 发明人: Alexander Sohmer , Aurelian Dodoc , Heiko Feldmann , Wilhelm Ulrich , Gerhard Fuerter , Rafael Egger , Artur Moegele , Michael Raum
- 申请人: Alexander Sohmer , Aurelian Dodoc , Heiko Feldmann , Wilhelm Ulrich , Gerhard Fuerter , Rafael Egger , Artur Moegele , Michael Raum
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 国际申请: PCT/EP2006/003864 WO 20060426
- 国际公布: WO2006/114294 WO 20061102
- 主分类号: G02B3/00
- IPC分类号: G02B3/00 ; G03F7/20 ; G02B17/08 ; G02B27/00
摘要:
An illumination system of a microlithographic exposure apparatus comprises a condenser for transforming a pupil plane into a field plane. The condenser has a lens group that contains a plurality of consecutive lenses. These lenses are arranged such that a light bundle focused by the condenser on an on-axis field point converges within each lens of the lens group. At least one lens of the lens group has a concave surface. The illumination system may further comprise a field stop objective that at least partly corrects a residual pupil aberration of the condenser.
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