发明授权
- 专利标题: Optical modulator
- 专利标题(中): 光调制器
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申请号: US13582841申请日: 2011-03-01
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公开(公告)号: US08873895B2公开(公告)日: 2014-10-28
- 发明人: Junichi Fujikata , Motofumi Saitoh , Jun Ushida , Akio Toda
- 申请人: Junichi Fujikata , Motofumi Saitoh , Jun Ushida , Akio Toda
- 申请人地址: JP Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Young & Thompson
- 优先权: JP2010-049175 20100305
- 国际申请: PCT/JP2011/054563 WO 20110301
- 国际公布: WO2011/108508 WO 20110909
- 主分类号: G02F1/035
- IPC分类号: G02F1/035 ; H01L21/02
摘要:
To provide an optical modulator having a reduced size and reduced power consumption and capable of being easily connected to a waveguide and a method of manufacturing the optical modulator. The optical modulator has at least semiconductor layer (8) having a rib-shaped portion and doped so as to be of a first conduction type, dielectric layer (11) laid on first-conduction-type semiconductor layer (8), and semiconductor layer (9) laid on dielectric layer (11), having the width at the side opposite from dielectric layer (11) increased relative to the width of the rib-shaped portion, and doped so as to be of a second conduction type.
公开/授权文献
- US20130064491A1 OPTICAL MODULATOR 公开/授权日:2013-03-14
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