发明授权
- 专利标题: Electromechanical transducer and method of manufacturing the same
- 专利标题(中): 机电换能器及其制造方法
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申请号: US13425346申请日: 2012-03-20
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公开(公告)号: US08875583B2公开(公告)日: 2014-11-04
- 发明人: Kazutoshi Torashima , Ayako Kato
- 申请人: Kazutoshi Torashima , Ayako Kato
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2011-093370 20110419
- 主分类号: G01L11/00
- IPC分类号: G01L11/00 ; G01L9/12 ; G01R27/26 ; H04R19/00 ; B06B1/02
摘要:
Disclosed is an electromechanical transducer, including: a cell including a substrate, a vibration film, and a supporting portion of the vibration film configured to support the vibration film so that a gap is formed between the substrate and the vibration film; and a lead wire that is placed on the substrate with an insulator interposed therebetween and extends to the cell, wherein the insulator has a thickness greater than the thickness of the supporting portion. The electromechanical transducer can reduce parasitic capacitance to prevent an increase in noise, a reduction in bandwidth, and a reduction in sensitivity.
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