发明授权
- 专利标题: Apparatus and method for analyzing thermal properties of composite structures
- 专利标题(中): 用于分析复合结构热性能的装置和方法
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申请号: US13236039申请日: 2011-09-19
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公开(公告)号: US08878926B2公开(公告)日: 2014-11-04
- 发明人: Zheng John Ye , Kartik Ramaswamy , Troy S. Detrick , Kenneth S. Collins
- 申请人: Zheng John Ye , Kartik Ramaswamy , Troy S. Detrick , Kenneth S. Collins
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan, LLP
- 主分类号: G01N25/72
- IPC分类号: G01N25/72
摘要:
Embodiments of the present invention provide methods and apparatus for analyzing thermal properties of bonding materials within a composite structure. One embodiment of the present invention provides an apparatus for analyzing thermal property of a bonding material within a structure. The apparatus comprises a structure support having a supporting surface configured to support the structure, a heat source configured to direct a heat flux to the structure supported by the supporting surface of the structure support, and a camera facing the structure supported on the structure support and configured to capture thermal images of the structure supported on the structure support.
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