发明授权
- 专利标题: Electrostatic chuck with polymer protrusions
- 专利标题(中): 具有聚合物突起的静电卡盘
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申请号: US13266657申请日: 2010-05-13
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公开(公告)号: US08879233B2公开(公告)日: 2014-11-04
- 发明人: Richard A. Cooke , Nate Richard , Steven Donnell , Mark Vose , Yan Liu
- 申请人: Richard A. Cooke , Nate Richard , Steven Donnell , Mark Vose , Yan Liu
- 申请人地址: US MA Billerica
- 专利权人: Entegris, Inc.
- 当前专利权人: Entegris, Inc.
- 当前专利权人地址: US MA Billerica
- 代理机构: Hamilton, Brook, Smith & Reynolds, P.C.
- 国际申请: PCT/US2010/034667 WO 20100513
- 国际公布: WO2010/132640 WO 20101118
- 主分类号: H01T23/00
- IPC分类号: H01T23/00 ; H01L21/683 ; H01L21/687
摘要:
In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises a surface layer activated by a voltage in an electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of polymer protrusions and a charge control layer to which the plurality of polymer protrusions adhere, the plurality of polymer protrusions extending to a height above portions of the charge control layer surrounding the plurality of polymer protrusions to support the substrate upon the plurality of polymer protrusions during electrostatic clamping of the substrate.
公开/授权文献
- US20120044609A1 Electrostatic Chuck With Polymer Protrusions 公开/授权日:2012-02-23