发明授权
- 专利标题: Transfer device, and workpiece mounting device
- 专利标题(中): 传送装置和工件安装装置
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申请号: US13580663申请日: 2010-10-26
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公开(公告)号: US08882437B2公开(公告)日: 2014-11-11
- 发明人: Hideaki Nakanishi
- 申请人: Hideaki Nakanishi
- 申请人地址: JP Kyoto-shi
- 专利权人: Murata Machinery, Ltd.
- 当前专利权人: Murata Machinery, Ltd.
- 当前专利权人地址: JP Kyoto-shi
- 代理机构: Adli Law Group P.C.
- 优先权: JP2010-037904 20100223
- 国际申请: PCT/JP2010/006307 WO 20101026
- 国际公布: WO2011/104790 WO 20110901
- 主分类号: B66C1/00
- IPC分类号: B66C1/00 ; B66C3/00 ; B65G49/06 ; H01L21/683 ; H01L21/687
摘要:
A non-contact holding device (1) attached to a parallel mechanism robot (100) has a square plate-like base member (10), a Bernoulli chuck (20) attached to the center on a rear surface of the base member (10), and eight pin-like guide members (30) that are disposed facing each other with the Bernoulli chuck (20) therebetween and that are provided on the rear surface of the base member (10) in a protruding manner. The guide members (30) facing each other are configured to be able to move away from each other. These guide members (30) move away from each other along inner surfaces of guide holes (72) of a workpiece mounting tray (70, 71) as the Bernoulli chuck (20) approaches a workpiece mounting surface (75) of the workpiece mounting tray (70, 71).
公开/授权文献
- US20120313388A1 TRANSFER DEVICE, AND WORKPIECE MOUNTING DEVICE 公开/授权日:2012-12-13
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