发明授权
- 专利标题: Suspended nanowire structure
- 专利标题(中): 悬浮纳米线结构
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申请号: US13600324申请日: 2012-08-31
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公开(公告)号: US08889564B2公开(公告)日: 2014-11-18
- 发明人: Kangguo Cheng , James J. Demarest , Balasubramanian S. Haran
- 申请人: Kangguo Cheng , James J. Demarest , Balasubramanian S. Haran
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Joseph P. Abate, Esq.
- 主分类号: H01L21/302
- IPC分类号: H01L21/302 ; H01L21/461
摘要:
A mandrel having vertical planar surfaces is formed on a single crystalline semiconductor layer. An epitaxial semiconductor layer is formed on the single crystalline semiconductor layer by selective epitaxy. A first spacer is formed around an upper portion of the mandrel. The epitaxial semiconductor layer is vertically recessed employing the first spacers as an etch mask. A second spacer is formed on sidewalls of the first spacer and vertical portions of the epitaxial semiconductor layer. Horizontal bottom portions of the epitaxial semiconductor layer are etched from underneath the vertical portions of the epitaxial semiconductor layer to form a suspended ring-shaped semiconductor fin that is attached to the mandrel. A center portion of the mandrel is etched employing a patterned mask layer that covers two end portions of the mandrel. A suspended semiconductor fin is provided, which is suspended by a pair of support structures.
公开/授权文献
- US20140061582A1 SUSPENDED NANOWIRE STRUCTURE 公开/授权日:2014-03-06