发明授权
- 专利标题： Optical device, laser apparatus, and extreme ultraviolet light generation system
- 专利标题（中）： 光学装置，激光装置和极紫外光发生系统
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申请号： US13817818申请日： 2012-02-17
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公开(公告)号： US08891161B2公开(公告)日： 2014-11-18
- 发明人: Hakaru Mizoguchi , Takashi Suganuma , Hideo Hoshino , Osamu Wakabayashi
- 申请人： Hakaru Mizoguchi , Takashi Suganuma , Hideo Hoshino , Osamu Wakabayashi
- 申请人地址： JP Tochigi
- 专利权人： Gigaphoton Inc.
- 当前专利权人： Gigaphoton Inc.
- 当前专利权人地址： JP Tochigi
- 代理机构： McDermott Will & Emery LLP
- 优先权： JP2011-037703 20110223
- 国际申请： PCT/IB2012/000295 WO 20120217
- 国际公布： WO2012/114178 WO 20120803
- 主分类号： H01S3/101
- IPC分类号： H01S3/101
摘要：
An optical device may include: an optical module disposed in a beam delivery path of a laser beam; a beam adjusting unit disposed in the beam delivery path for adjusting the beam delivery path of the laser beam; a measuring unit disposed in the beam delivery path for detecting the beam delivery path; and a control unit for controlling the beam adjusting unit based on a detection result of the beam delivery path of the laser beam detected by the measuring unit.
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