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US08892967B2 Measurement device and measurement method 有权
测量装置及测量方法

Measurement device and measurement method
摘要:
A logic block group 120 having at least one set including a logic block having at least one logic circuit and a sequential circuit that inputs the output of the logic block is arranged in an irradiation region 110 of a high-energy particle irradiation device, and subjected to irradiation with high-energy particles. A control section 101 calculates the error rate of the logic circuit from the value obtained by subtracting the number of errors of the sequential circuit when the logic block of the logic block group 120 is bypassed, from the number of errors of the sequential circuit and the logic block of the logic block group 120.
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