发明授权
- 专利标题: Pattern forming apparatus
- 专利标题(中): 图案形成装置
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申请号: US13531206申请日: 2012-06-22
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公开(公告)号: US08893647B2公开(公告)日: 2014-11-25
- 发明人: Masanobu Iwashima , Masakazu Sanada , Hiroyuki Ueno
- 申请人: Masanobu Iwashima , Masakazu Sanada , Hiroyuki Ueno
- 申请人地址: JP Kyoto
- 专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2011-185558 20110829
- 主分类号: B05C3/00
- IPC分类号: B05C3/00 ; B05C5/02 ; B05B3/00 ; B05C13/02 ; B05C17/005
摘要:
A tip section of a discharge nozzle 31 is shaped like a wedge, and projections 310 which further protrude are formed at the tip of the wedge. Lower surfaces 310b of the projections 310 define a substrate-facing-surface which is brought into proximity to the substrate, and discharge outlet bearing surfaces 310c, which gradually retract back from the substrate W, are formed as if to rise from the edges of the lower surfaces 310b. At adjacent positions within the discharge outlet bearing surface 310c which are adjacent to the substrate-facing-surface 310b, discharge outlets 311 for discharging an application liquid are opened. Areas around the discharge outlets 311 and a wall around a fluid feeding path 312 are integrated with each other.
公开/授权文献
- US20130047919A1 PATTERN FORMING APPARATUS 公开/授权日:2013-02-28
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