Invention Grant
- Patent Title: MEMS vibration isolation system and method
- Patent Title (中): MEMS振动隔离系统及方法
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Application No.: US13358744Application Date: 2012-01-26
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Publication No.: US08896074B2Publication Date: 2014-11-25
- Inventor: Jonathan Bernstein , Marc Weinberg
- Applicant: Jonathan Bernstein , Marc Weinberg
- Applicant Address: US MA Cambridge
- Assignee: The Charles Stark Draper Laboratory, Inc.
- Current Assignee: The Charles Stark Draper Laboratory, Inc.
- Current Assignee Address: US MA Cambridge
- Agency: Lando & Anastasi, LLP
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/00

Abstract:
A microelectromechanical vibration isolation system includes a microelectromechanical structure having a plurality of fin apertures etched therethrough, and a plurality of fins each disposed within a respective one of the plurality of fin apertures and spaced apart from the microelectromechanical structure so as to define a fluid gap therebetween. The fluid gap is configured to provide squeeze film damping of vibrations imparted upon the microelectromechanical structure in at least two dimensions. The system further includes a frame surrounding the microelectromechanical structure, and a plurality of springs each coupled to the microelectromechanical structure and to the frame. The plurality of springs is configured to support the micromechanical structure in relation to the frame.
Public/Granted literature
- US20130194770A1 MEMS VIBRATION ISOLATION SYSTEM AND METHOD Public/Granted day:2013-08-01
Information query
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