Invention Grant
US08900478B2 Etchant and method for manufacturing semiconductor device using same
有权
用于制造使用其的半导体器件的蚀刻剂和方法
- Patent Title: Etchant and method for manufacturing semiconductor device using same
- Patent Title (中): 用于制造使用其的半导体器件的蚀刻剂和方法
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Application No.: US13516524Application Date: 2010-12-14
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Publication No.: US08900478B2Publication Date: 2014-12-02
- Inventor: Akira Hosomi , Kensuke Ohmae
- Applicant: Akira Hosomi , Kensuke Ohmae
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Gas Chemical Company, Inc.
- Current Assignee: Mitsubishi Gas Chemical Company, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-284173 20091215
- International Application: PCT/JP2010/072506 WO 20101214
- International Announcement: WO2011/074589 WO 20110623
- Main IPC: C09K13/00
- IPC: C09K13/00 ; H01L23/00 ; C23F1/02 ; C23F1/18 ; H01L21/3213 ; H01L23/31 ; H01L23/525

Abstract:
Disclosed are an etchant which is used for redistribution of a semiconductor substrate having an electrode and which is capable of selectively etching copper without etching nickel; and a method for manufacturing a semiconductor device using the same. Specifically disclosed are an etchant which is used for redistribution of a semiconductor substrate and which contains hydrogen peroxide and citric acid and has a content of hydrogen peroxide of from 0.75 to 12% by mass and a content of citric acid of from 1 to 20% by mass, with a molar ratio of hydrogen peroxide and citric acid being in the range of from 0.3 to 5; an etchant for selective etching of copper which is used for redistribution of a semiconductor substrate and which contains hydrogen peroxide and malic acid and has a content of hydrogen peroxide of from 0.75 to 12% by mass and a content of malic acid of from 1.5 to 25% by mass, with a molar ratio of hydrogen peroxide and malic acid being in the range of from 0.2 to 6; and a method for manufacturing a semiconductor device using such an etchant.
Public/Granted literature
- US20120261608A1 ETCHANT AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING SAME Public/Granted day:2012-10-18
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