Invention Grant
US08906728B2 Method for manufacturing a photodetector having a bandwidth tuned honeycomb cell photodiode structure
有权
具有带宽调谐蜂窝单元光电二极管结构的光电检测器的制造方法
- Patent Title: Method for manufacturing a photodetector having a bandwidth tuned honeycomb cell photodiode structure
- Patent Title (中): 具有带宽调谐蜂窝单元光电二极管结构的光电检测器的制造方法
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Application No.: US14171339Application Date: 2014-02-03
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Publication No.: US08906728B2Publication Date: 2014-12-09
- Inventor: Subhash Roy , Igor Zhovnirovsky , Sergey Vinogradov
- Applicant: Applied Micro Circuits Corporation , Volex PLC
- Applicant Address: US CA San Diego GB London
- Assignee: Applied Micro Circuits Corporation,Volex PLC
- Current Assignee: Applied Micro Circuits Corporation,Volex PLC
- Current Assignee Address: US CA San Diego GB London
- Agency: Baker & Hostetler LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G01J1/44 ; H01L31/00 ; H01L21/66 ; H01L31/02

Abstract:
A photodetector with a bandwidth-tuned cell structure is provided. The photodetector is fabricated from a semiconductor substrate that is heavily doped with a first dopant. A plurality of adjoining cavities is formed in the semiconductor substrate having shared cell walls. A semiconductor well is formed in each cavity, moderately doped with a second dopant opposite in polarity to the first dopant. A layer of oxide is grown overlying the semiconductor wells and an annealing process is performed. Then, metal pillars are formed that extend into each semiconductor well having a central axis aligned with an optical path. A first electrode is connected to the metal pillar of each cell, and a second electrode connected to the semiconductor substrate. The capacitance between the first and second electrodes decreases in response to forming an increased number of semiconductor wells with a reduced diameter, and forming metal pillars with a reduced diameter.
Public/Granted literature
- US20140147945A1 METHOD FOR MANUFACTURING A PHOTODETECTOR HAVING A BANDWIDTH TUNED HONEYCOMB CELL PHOTODIODE STRUCTURE Public/Granted day:2014-05-29
Information query
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