Invention Grant
- Patent Title: Method of forming membranes with modified stress characteristics
- Patent Title (中): 形成具有改性应力特性的膜的方法
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Application No.: US13232073Application Date: 2011-09-14
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Publication No.: US08906730B2Publication Date: 2014-12-09
- Inventor: Andrew B. Graham , Gary Yama , Gary O'Brien
- Applicant: Andrew B. Graham , Gary Yama , Gary O'Brien
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot Moore & Beck LLP
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B3/00 ; G01L9/00
Abstract:
A method of modifying stress characteristics of a membrane in one embodiment includes providing a membrane layer, determining a desired stress modification, and forming at least one trough in the membrane layer based upon the determined desired stress modification.
Public/Granted literature
- US20120264250A1 METHOD OF FORMING MEMBRANES WITH MODIFIED STRESS CHARACTERISTICS Public/Granted day:2012-10-18
Information query
