发明授权
US08906754B2 Methods of forming a semiconductor device with a protected gate cap layer and the resulting device 有权
用保护的栅极盖层形成半导体器件的方法和所得到的器件

Methods of forming a semiconductor device with a protected gate cap layer and the resulting device
摘要:
One method disclosed herein includes forming first and second gate cap protection layers that encapsulate and protect a gate cap layer. A novel transistor device disclosed herein includes a gate structure positioned above a semiconductor substrate, a spacer structure positioned adjacent the gate structure, a layer of insulating material positioned above the substrate and around the spacer structure, a gate cap layer positioned above the gate structure and the spacer structure, and a gate cap protection material that encapsulates the gate cap layer, wherein portions of the gate cap protection material are positioned between the gate cap layer and the gate structure, the spacer structure and the layer of insulating material.
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