发明授权
US08906754B2 Methods of forming a semiconductor device with a protected gate cap layer and the resulting device
有权
用保护的栅极盖层形成半导体器件的方法和所得到的器件
- 专利标题: Methods of forming a semiconductor device with a protected gate cap layer and the resulting device
- 专利标题(中): 用保护的栅极盖层形成半导体器件的方法和所得到的器件
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申请号: US13839802申请日: 2013-03-15
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公开(公告)号: US08906754B2公开(公告)日: 2014-12-09
- 发明人: Daniel Pham , Xiuyu Cai , Balasubramanian Pranatharthiharan , Pranita Kulkarni
- 申请人: GLOBALFOUNDRIES Inc. , International Business Machines Corporation
- 申请人地址: KY Grand Cayman US NY Armonk
- 专利权人: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- 当前专利权人: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- 当前专利权人地址: KY Grand Cayman US NY Armonk
- 代理机构: Amerson Law Firm, PLLC
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L29/78 ; H01L29/66
摘要:
One method disclosed herein includes forming first and second gate cap protection layers that encapsulate and protect a gate cap layer. A novel transistor device disclosed herein includes a gate structure positioned above a semiconductor substrate, a spacer structure positioned adjacent the gate structure, a layer of insulating material positioned above the substrate and around the spacer structure, a gate cap layer positioned above the gate structure and the spacer structure, and a gate cap protection material that encapsulates the gate cap layer, wherein portions of the gate cap protection material are positioned between the gate cap layer and the gate structure, the spacer structure and the layer of insulating material.
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