Invention Grant
US08906754B2 Methods of forming a semiconductor device with a protected gate cap layer and the resulting device
有权
用保护的栅极盖层形成半导体器件的方法和所得到的器件
- Patent Title: Methods of forming a semiconductor device with a protected gate cap layer and the resulting device
- Patent Title (中): 用保护的栅极盖层形成半导体器件的方法和所得到的器件
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Application No.: US13839802Application Date: 2013-03-15
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Publication No.: US08906754B2Publication Date: 2014-12-09
- Inventor: Daniel Pham , Xiuyu Cai , Balasubramanian Pranatharthiharan , Pranita Kulkarni
- Applicant: GLOBALFOUNDRIES Inc. , International Business Machines Corporation
- Applicant Address: KY Grand Cayman US NY Armonk
- Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- Current Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- Current Assignee Address: KY Grand Cayman US NY Armonk
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/78 ; H01L29/66

Abstract:
One method disclosed herein includes forming first and second gate cap protection layers that encapsulate and protect a gate cap layer. A novel transistor device disclosed herein includes a gate structure positioned above a semiconductor substrate, a spacer structure positioned adjacent the gate structure, a layer of insulating material positioned above the substrate and around the spacer structure, a gate cap layer positioned above the gate structure and the spacer structure, and a gate cap protection material that encapsulates the gate cap layer, wherein portions of the gate cap protection material are positioned between the gate cap layer and the gate structure, the spacer structure and the layer of insulating material.
Public/Granted literature
- US20140264487A1 METHODS OF FORMING A SEMICONDUCTOR DEVICE WITH A PROTECTED GATE CAP LAYER AND THE RESULTING DEVICE Public/Granted day:2014-09-18
Information query
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