Invention Grant
US08906799B1 Random local metal cap layer formation for improved integrated circuit reliability
有权
随机局部金属盖层形成,提高集成电路可靠性
- Patent Title: Random local metal cap layer formation for improved integrated circuit reliability
- Patent Title (中): 随机局部金属盖层形成,提高集成电路可靠性
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Application No.: US13953058Application Date: 2013-07-29
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Publication No.: US08906799B1Publication Date: 2014-12-09
- Inventor: Ronald G. Filippi , Erdem Kaltalioglu , Wai-Kin Li , Ping-Chuan Wang , Lijuan Zhang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Catherine Ivers; Howard M. Cohn
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L23/532 ; H01L21/768

Abstract:
A method and structure for preventing integrated circuit failure due to electromigration and time dependent dielectric breakdown is disclosed. A randomly patterned metal cap layer is selectively formed on the metal interconnect lines (typically copper (Cu)) with an interspace distance between metal cap segments that is less than the critical length (for short-length effects). Since the diffusivity is lower for the Cu/metal cap interface than for the Cu/dielectric cap interface, the region with a metal cap serves as a diffusion barrier.
Information query
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