发明授权
- 专利标题： Optical device and method of making
- 专利标题（中）： 光学装置及制作方法
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申请号： US13068129申请日： 2011-05-03
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公开(公告)号： US08912549B2公开(公告)日： 2014-12-16
- 发明人: Nathaniel R. Quick , Aravinda Kar , Islam A. Salama
- 申请人： Nathaniel R. Quick , Aravinda Kar , Islam A. Salama
- 申请人地址： US FL Orlando
- 专利权人： University of Central Florida
- 当前专利权人： University of Central Florida
- 当前专利权人地址： US FL Orlando
- 代理机构： Frijouf, Rust & Pyle P.A.
- 主分类号： H01L21/322
- IPC分类号： H01L21/322 ; H01L31/0312 ; H01L31/0352 ; G01J5/08 ; G01K11/12 ; H01L21/268 ; G01J5/58
摘要：
An optical device and method is disclosed for forming the optical device within the wide-bandgap semiconductor substrate. The optical device is formed by directing a thermal energy beam onto a selected portion of the wide-bandgap semiconductor substrate for changing an optical property of the selected portion to form the optical device in the wide-bandgap semiconductor substrate. The thermal energy beam defines the optical and physical properties of the optical device. The optical device may take the form of an electro-optical device with the addition of electrodes located on the wide-bandgap semiconductor substrate in proximity to the optical device for changing the optical property of the optical device upon a change of a voltage applied to the optional electrodes. The invention is also incorporated into a method of using the optical device for remotely sensing temperature, pressure and/or chemical composition.
公开/授权文献
- US20110211249A1 Optical device and method of making 公开/授权日：2011-09-01
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